Download PDF by Andreas Hierlemann: Integrated Chemical Microsensor Systems in CMOS Technology

By Andreas Hierlemann

ISBN-10: 3540237828

ISBN-13: 9783540237822

ISBN-10: 3642062741

ISBN-13: 9783642062742

This booklet offers a complete therapy of the very interdisciplinary ?eld of CMOS technology-based chemical microsensor structures. it truly is, at the one hand, certain at scientists and engineers attracted to getting rst - attractions within the ?eld of chemical sensing due to the fact that all invaluable basic kno- edgeisincluded.Ontheotherhand, italsoaddressesexpertsinthe?eldsince it offers distinctive details on all vital matters with regards to figuring out chemicalmicrosensorsand, speci?cally, chemicalmicrosensorsinCMOSte- nology. lots of sensor and integrated-sensor-system implemen- tionsillustratethecurrentstateoftheartandhelptoidentifythepossibilities for destiny advancements. seeing that microsensors produce "microsignals," sensor miniaturization with no sensor integration is in lots of circumstances vulnerable to failure. This ebook can help to bare the bene?ts of utilizing built-in electronics and CMOS-technology for constructing chemical microsensor structures and, in p- ticular, the benefits that end result from understanding monolithically built-in sensor structures comprising transducers and linked circuitry on a unmarried chip. After a short creation, the basics of chemical sensing are laid out, includingashortexcursionintotherelatedthermodynamicsandkinetics. Fabrication and processing steps which are ordinary in semiconductor are then abstracted. those extra primary sections are through a quick description of microfabrication strategies and the CMOS s- strateandmaterials.Thereafter, acomprehensiveoverviewofsemiconduct- dependent and CMOS-based transducer buildings for chemical sensors is given.

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Integrated Chemical Microsensor Systems in CMOS Technology (Microtechnology and MEMS) by Andreas Hierlemann


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